Wafer Resistivity
See Also: Wafer, Wafer Thickness, Wafer Failure Analysis, Wafer Edge, Wafer Mapping, Wafer Probes, Wafer Probers, Wafer Inspection, Four Point Probes
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Hand Held Probe Type Eddy Current Sheet Resistance/resistivity Measurement Instrument
EC-80P (Portable)
*Auto-measurement start by probe head contacting to sample*3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range*Resistivity probe can be changed by sample’s resistivity range
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Semiconductor Metrology Systems
MTI Instruments'' semiconductor wafer metrology tools consist of a complete line of wafer measurement systems for virtually any material including Silicon wafer (Si), Gallium Arsenide wafer (GaAs), Germanium wafer (Ge) and Indium Phosphide wafer (InP). From manual to semi-automated wafer inspection systems, the Proforma line of wafer metrology inspection tools is ideal for wafer thickness, wafer bow, wafer warp, resistivity, site and global flatness measurement. Our proprietary push/pull capacitance probes provide outstanding accuracy throughout their large measurement range, allowing measurement of highly warped wafers and stacked wafers. MTII''s solar metrology tools include off line manual systems for wafer thickness and Total Thickness Variation (TTV), as well as, in-process measurement systems capable of measuring wafer thickness, TTV and wafer bow at the speed of 5 wafers/second.
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4-Probe Resistivity and Resistance Tester
HS-MPRT-5
t used for measuring resistivity of silicon rods and wafers, and sheet resistance of diffused layers, epitaxial layers, LTO conductive films and conductive rubbers, etc.
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Wafer Probe Loadboards/PIB
DTS has a full line of standard PIBs for all major tester platforms. Custom PIB designs can accommodate any test head, prober and manipulator configuration, including probe card changers, overhead direct dock setups and cable interfaces. DTS wafer test loadboards are compatible with a variety of pogo pin interface towers. All PIBs are constructed with impedance control, precision matched line lengths, full power and ground planes and both analog and digital resources to provide high quality signal integrity directly to the device.
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Wafer Mapping Sensor
M-DW1
Panasonic Industrial Devices Sales Company of America
To provide better safety and improved sensing accuracy, Panasonic studied the requirements for future Wafer Mapping Sensors to ultimately develop the LED Beam Reflective Type Wafer Mapping Sensor, M-DW1. This Sensor uses LEDs as a light source for safe operation and a 2-segment receiving element for higher accuracy in wafer detection.
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Contactless Wafer Gauge for Resistivity, Thickness
MX 60x
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
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Wafer Inspection Machine
IV-W2000
The IV-W2000 is a wafer inspection machine that features on-the-fly scanning and inspection as well as automatic handling of 6/8/12-inch wafers. With the option to have a Chinese language UI, this machine is also known for being intuitive and user-friendly.
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Wafer Inspection System
INSPECTRA® Series
INSPECTRA® series meet the requests of 100% automatic inspection with high speed and high specifications from front-end to back-end of semiconductor processing. INSPECTRA® series are wafer inspection systems with high speed and high sensitivity. Our original "Die-to-Statistical-Image" comparison method achieves the target defects detection controlling process variation and overkill.
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Portable Wafer Probe Station
PS-5026B
High Power Pulse Instruments GmbH
The PS-5026B is a rugged portable wafer probing solution which has been designed for high reliability, compact size and minimum cost.
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Semi-Automatic Contactless Wafer Detector
NCS-200SA
Semi-Automatically, non-contact measurement of wafer thickness, TTV ,bow,Point and flatness.Portable and easy to set-up, the Proforma 300/G measures all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and wafers mounted to sapphire or tape.the powerful software can test all the data above within several seconds,all the design according to SEMI standard and the ASTM,make sure the data can be easily unify. the system can used for several sample size,like 75 mm, 100 mm, 125 mm, 150 mm, 200 mm
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2D/3D Wafer Metrology System
7980
Chroma 7980 provides accurate and reliable profile information. 7980 adopts new BLiS technology and specially designed platform to achieve 2D/3D nanoscale measurement.
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Wafer Demounting And Cleaning Machines
Demounting and cleaning to high throughput fully automatic ingot after cutting in the slicing machine and wire saw.
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Resistivity Meter
Model 2180
The unit is compact and lightweight. The basic system is 7″ wide by 2.5″ high and 12″ long. When measurements are needed below approximately 100 micro-ohm-centimeters, the basic system is piggybacked onto a second enclosure that houses a power amplifier with a current gain of ten. The combined unit measures 7″ wide by 5″ high and 12″ long. The combined unit weighs 11.5 pounds. Two short cables interconnect the two enclosures for powering the power amplifier and routing the signals to the fixture or four point probe. The front panel of the basic system includes a 32-character backlit LCD display and a set of function keys. An easy-to-use menu will allow access to user defined parameters such as sample thickness, sample volume, and calibration constants; upper and lower alarm limits, relative measurements, and several others.
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Wafer Chucks
ARC, in addition to fabricating Wafer Chucks from aluminum, is also known for its ability to work in hard to machine materials such as hardened (50-62 Rockwell) metal alloys, fired ceramics, e.g. SiC and glasses. These materials are often ideal for semiconductor equipment applications due to their ability to hold critical dimensions and tolerances. ARC specializes in surface grinding and lapping these materials to precision flatness and parallelism specifications needed for semiconductor wafer chuck requirements.
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In-situ Wafer Temperature Monitoring
CI Semi's family of noncontact temperature monitors (the NTM line), offers high end pyrometry products for the measurement of wafer temperatures during process. CI Semi’s flag ship of the line, the NTM Delta, incorporates real-time, same point emissivity measurement and compensation making it the ideal solution for in situ monitoring for processes such as RTP, CVD and PVD. The NTM family is sold to leading tool manufacturers.
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Resistance Welding
Resistance welding is a method in which the welding works are heated by resistance heat generated by sandwiching the welding workpieces with welding electrodes, passing current through them, and the metal is welded while pressurizing the works.A resistance welding machine composed of welding power supply, a weld head and an electrode. The welding power supply controls a welding current,the weld head exerts a pressure on the material to weld and the electrode provides welding current and pressurization force to the part under welding. We have been providing various kinds of welding power supplies and welding heads to meet these requirements.
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Wafer Test
Based on the reliability test, CSE conducts the test of the IC chip through electrical signals to the semiconductor wafer. We provide various Test Solutions according to the needs of designers/manufacturers. by sorting out good and bad products.
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Wafer Probe Test System
STI3000
The STI3000 is a wafer-level MEMS and mixed signal ASIC probe test system that combines several functional STI test equipment blocks for testing gyros, accelerometers, pressure sensors, microphones, resonators, and mixed signal ASICs.
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Inspects MEMS and Wafer Level Devices
NorCom 2020-WL
The NorCom 2020-WL is specifically designed for wafer-level inspection and leak tests up to 1000 devices per cycle. The system can inspect up to an 8” wafer on or off a saw frame. It is designed to test MEMS and other wafer level devices that have a cavity.
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Wafer Prober
Prexa
The latest fully automated 300mm wafer prober. The system offers excellent productivity and advanced functions, contributing to KGD (known good die) testing for advanced packaging.
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Wafer Tester
Tokyo Electronics Trading Co., Ltd.
A vital step in the Semiconductor Value Stream, focusing on electrical screening and consumption of Known Good Die (KGD).
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Winding Resistance Meter
* Selectable four resistance ranges.* 4 1/2 digits LED display* High measurement Current (10A)* True four Technique elimanates lead resistance errors Systems* Fully protected against overloads* Proven design* Computer connectivity through RS 232
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Industrial Resistivity Meter
HE-480R(W)
The HE-480R industrial resistivity meter features the high-precision temperature compensation function.Its high-performance temperature compensation makes it ideal for sequential monitoring of ultra-pure water used in manufacturing processes in the semiconductor field, and many other fields, including the areas of electrical goods, foods and medicines. The measurement range is from 0 to 100.0 MΩ・cm.
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Resistive Touch Controllers
Analog Devices offers a range of controller ICs for use with 4-wire resistive touch screens. These controllers can be used in human machine interface applications in consumer, automotive, and other products. Analog Devices’ controllers have 12 bits of resolution, SPI/I2C interface options, and low power consumption, making them ideal for use in handheld devices.
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Resistance Tester
METRISO® 3000
Wolfgang Warmbier GmbH & Co. KG
Suitable for resistance point-to-point and resistance to ground measurementsIntegrated data logger with USB communication port for data transmission (50.000 test values). The supplied Report Generating Software ETC allows to generate a complete test reportA barcode scanner can be used in order to record measurement points before testing
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Insulation Resistance Tester
Aarohi Embedded Systems Pvt. Ltd
Aarohi make device enable us to measure electrical leakage in wire, results are very reliable as we shall be passing electric current through device while we are testing. The equipment basically uses for verifying the electrical insulation level of any device such as motors, cables, generators, windings, etc.
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Resistance Software
OhmRef
OhmRef provides the power of automation for Standards maintaining statistical control of resistance values in your laboratory. This program controls a Low Thermal Scanner along with other equipment commonly available in Standards Laboratories to compare resistance standards over the range of 100µΩ to 10GΩ . Comparison accuracies arebetter than 1 ppm in the midranges.
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Insulation Resistance Measurement
MD 15KVR
The digital insulation tester model MD-15KVR is Megabras' cutting edge insulation analyzer equipment and it is one of the most complete and sophisticated available in the international market. A powerful software allows for further analysis of tests results, including features such as graphical representation and automatic report generation. Its proven technology provides safe, reliable and accurate measurements of insulation resistances up to 15 TΩ, with 4 pre-selected test voltages, 500 V - 5 kV - 10 kV - 15 kV. Other test voltages may be selected in steps of 25 V, 100 V or 500 V.
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Resistivity Monitor / Controllers
750 Series II Resistivity Monitor & Controllers
The unique circuitry of the 750 Series II Resistivity Monitor/controllers guarantees accurate and reliable measurements. Drift-free performance is assured by “field proven” electronics, including automatic DC offset compensation and highly accurate drive voltage. Since temperature compensation is at the heart of accurate water measurement, all Myron L® Monitor/controllers feature a highly refined and precise TC circuit. This feature perfectly matches the water temperature coefficient as it changes. All models corrected to 25°C. The TC may be disabled to conform with USP requirements.
