Ozone
Trioxygen
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Product
Photometric Ozone Calibrator
Model T703
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Teledyne Advanced Pollution Instrumentation
The Model T703 is a microprocessor controlled ozone calibrator for precision gas analyzers. The Model T703 can deliver concentrations from 50 ppb to 5 ppm at flows from 1 LPM to 5 LPM.The Model T703 has two major components; the ozone generating device and the photometer. The ozone generator produces ozone by passing zero air over a UV lamp. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperate and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703, covering time periods up to a year.
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Product
Ozone Test
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Ozone is an extremely reactive form of oxygen occurring around electrical discharges. It is also present in the atmosphere, but in small quantities. Ozone testing is performed to determine the effect on materials such as rubber, plastics, etc, which are susceptible to ozone-induced degradation.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Meters
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In this section you will find an ozone meter to determine the content of ozone in the air or in the water. The ozone meter is essentially used in environmental technology, but the ozone meter is also used in industrial processes. The ozone meter in water is necessary for water treatment or recycling facilities, such as disinfection processes. The handling of the ozone meter is very simple. The recalibration of the ozone meter can be made by the user at any time. The ozone meter in air requires a more complicated calibration, usually a sensor works for two years with optimal results (little variation) before having to be changed.
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Product
Ozone Aging Test Chambers
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Dongguan Amade Instruments Technology Co., Ltd
Ozone aging test chamber is also called as ozone climate simulator or ozone aging tester. It is one of climatic testing instruments, which is to simulate and intensify the ozone condition for determining the cracking resistance of vulcanized or thermoplastic rubbers when subjected to dynamic or static tensile strain exposed at a man-made constant temperature to atmosphere containing given concentration of ozone in conformance with relevant specification. Ozone test is an indispensable method for people to research effects and mechanisms of ozone on rubbers, quick identify and evaluate anti-aging performance of rubbers and find solutions for improvement of quality and lifespan.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSLT
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Process Ozone Monitor
Model 465H
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Teledyne Advanced Pollution Instrumentation
The Model 465H is a microprocessor based high concentration ozone monitor for measuring ozone in process gas streams in water treatment, food processing, and research applications. The 465H has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465H is available in a NEMA 4X wall mount enclosure.
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Product
Trace-Level Photometric Ozone Calibrator
Model T703U
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Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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Product
High-concentration, High Flow Ozone Generator
SEMOZON® AX8407
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The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.
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Product
Ozone Test Chambers
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Labodam Ozone Test Chambers are designed to detect the concentration of ozone while requiring low maintenance, having well-built corrosion resistant bodies, and while utilizing noiseless generators.
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Product
Dissolved Ozone Analyzer
Model 470
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Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Product
Ozone Generators & Systems
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MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Product
Catalytic Ozone Destructs
CAT-O3 Series
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Teledyne Advanced Pollution Instrumentation
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
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Product
Ozone 2 Click
64209
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Ozone 2 click is an ozone detection (O3) sensor, based on the MQ131 gas sensor.
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Product
Automatic Ozone Test Chamber
EKT-2001OZ
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (O3) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Dissolved Ozone Monitor
HZ-960
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High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
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Product
Ultra Clean, High Concentration, High Flow Ozone Generator
SEMOZON® AX8415
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The SEMOZON® AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, high concentration, high flow ozone is produced by this generator's novel architecture and patented cell design, converting oxygen to >400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display and photovoltaic industries.
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Product
Ozone Test Chamber
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Wewon Environmental Chambers Co, Ltd.
provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone.
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Product
Dissolved Ozone Instruments
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Teledyne Advanced Pollution Instrumentation
For measuring dissolved ozone concentrations in water a microprocessor controlled instrument can be used for automatic and continuous measurement by means of an disinfectant sensor. All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring.
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Product
Dissolved Gas Systems
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Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Product
Chemiluminescence 03 Analyzer
Model T265
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Teledyne Advanced Pollution Instrumentation
The Model T265 is the only commercially available US EPA Federal Reference Method for Ambient Ozone Monitoring according to the latest US EPA regulatory rules for O3. The instrument uses Chemilumescence with Nitric Oxide (NO) as a reagent, making is safe, stable, and effective for all applications. The NO-CL method for Ozone has several advantages over the conventional UV absorption technology, including the avoidance of positive and commonly found interferrents such as VOCs, fine particulates, Mercury, turpines, ClO2, and others. If these pollutants are present in the atmosphere, it can cause UV absorption analyzers to give an artificially high Ozone measurement. The innovative T265 combines speed of response, sensitivity and stability of our proven nitrogen oxide analyzer, with a simple user interface, to provide reliable ozone measurements under the harshest conditions.
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Product
Process Ozone Sensor
Model 452
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Teledyne Advanced Pollution Instrumentation
The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is a standard feature.
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Product
Ozone Test Chamber
EKT-2001OZ-HCLSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
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The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Product
Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
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The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSTX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Test Chamber
EKT-2001OZ-HPSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
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The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.




























