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Vapor Deposition
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Physical Vapor Deposition Systems
Physical Vapor Deposition Systems offer maximum flexibility for a wide range of thin film deposition applications with advanced process capabilities, unsurpassed uniformity and multiple deposition modes.
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High Temperature Absolute Pressure Transducers
Our high temperature Baratron® capacitance manometers are controlled to temperatures of 150°C or higher for use use in demanding semiconductor manufacturing vacuum processes such as metal etching and nitride film chemical vapor deposition (CVD).
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Matrix Vapor Deposition System
iMLayer
The iMLayer matrix vapor deposition system is sample pretreatment (application of matrix) in order to perform MALDI-MS imaging using an analysis system such as the iMScope imaging mass microscope or the MALDI-7090. With the iMLayer, the deposition method has been adopted as a pretreatment method to achieve high spatial resolution. By using this method, fine matrix crystal can be produced. Also, thanks to automated control, the coating thickness is reproducibly controlled as users configure.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Ozone Gas Generators
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Ceramic Process Carrier Pallets
Ceramic engineering specializing in Silicon Carbide, Boron Carbide, Alumina, Zirconia and Lead Zirconate Titanate (PZT) based ceramics, composites and thin films for High Strength, high temperature, semiconductive ceramic designed for use in wafer fabrication or hybrid circuits in vapor deposite ovens. Test Electronics will precision drill and customize pallets for your circuit board. Click on the Quote tab on the left then click on the Carrier Pallets tab to get an instant quotation on your process carrier pallets.
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Vapor Concentration Monitor
IR-300 Series
Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). Process results can be affected by changes especially in temperature and liquid level. The in-line IR-300 Series measures and reports the precursor concentration in real time.
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ICP Plasma System
The AXIC IsoLok® Inductively Coupled Plasma (ICP) Load-Locked Processing System from AXIC, Inc. defines a new concept in Deep Reactive Ion Etch (DRIE) and low temperature-low damage Plasma Enhanced Chemical Vapor Deposition (ICP-PECVD) plasma processing. The system is based on a modular design starting with a universal chamber and cabinet unit with ICP etch or deposition bottom electrodes available for easy installation into the chamber unit combined with a load-lock. We are confident you will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma product in the market.
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Thin-film deposition
Plasma Source
SPECS Surface Nano Analysis GmbH
Thin-film deposition covers any technique for depositing material onto a bulk or thin film substrate. Elemental alloy or compound films are produced by non-reactive or reactive (co-)deposition. Often functionalization or tailoring of device interfaces by predeposition or deposition assisting surface treatment with atoms or ions is necessary.
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Vapor Relays & Contactors
From rail passenger cars and locomotive control and starting circuits to earth moving equipment, Vapor relays and contactors have established a reputation for quality and reliability where dependable control of DC circuits is required. Performance-proven in thousands of applications worldwide, Vapor relays and contactors meet or exceed stringent qualification requirements of major locomotive and rail passenger car builders and heavy machinery manufacturers. Units are in daily service on U.S. Class 1 railroads, the New York City Transit Authority, the Chicago Transit Authority, the Toronto Transit Commission and other railroads and transit agencies around the globe.
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Vaporizers
Vaporizers are the backbone of gas phase processes, serving as the catalyst for converting liquids into essential gases. This transformative process is indispensable in a myriad of applications, ranging from precision thin film deposition to critical procedures like metal etching and doped epitaxial growth.
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Water Vapor Permeability Tester
WPT-304
WPT-304 Water Vapor Permeability Tester is manufactured based on the gravimetric method and is applicable to test the water vapor transmission rate of plastic films, composite films, sheets, and other materials used in packaging, medical and constructive industry.
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Water Vapor Permeability Tester
QT-WVP
Qualitest Water Vapor Permeability Tester QT-WVP series is used to test the water vapor transmission rate (WVTR) of packaging materials.
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Duct Deposit Measuring System
The Elcometer 456 Duct Deposit Measuring System has been specifically designed to meet the requirements of the DTT (Deposit Thickness Test) in HVCA’s (Heating & Ventilation Contractor’s Association) Guide to Good Practice, for the measurement of dust and grease deposits within ventilation systems and kitchen ducts made of ferrous metals.
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Reid Vapor Pressure Analyzers
Increase your gasoline blending profits with process Reid Vapor Pressure measurements and automatic air saturation of the sample.
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Water Vapor Transmission Rate Tester
(Electrolysis Method)
Shandong Drick Instruments Co., Ltd.
DRK311 water vapor transmission rate tester (electrolytic method), the instrument is suitable for the determination of water vapor transmission rate of plastic films, composite films and other films and sheet materials. Through the measurement of water vapor transmission rate, the technical indicators of control and adjustment of packaging materials and other products can be achieved to meet the different needs of product applications.
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Water Vapor Absorption Tester
DRK854A
Shandong Drick Instruments Co., Ltd.
Used to test the water vapor absorption performance of the sample.
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Large Flow Liquid Source Vaporization Control System
LE Series
A high-flow, high-efficiency, liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block which ensures maximum heat transfer, and the elimination of both cold spots and the risk of condensation. This Liquid Source Vaporization Control System can operate at up to 300 °C and can vaporize up to 30g/min of IPA (or equivalent).
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Water Vapor Transmission Rate Tester (infrared method)
DRK311
Shandong Drick Instruments Co., Ltd.
DRK311 water vapor transmission rate tester (infrared method), the instrument is suitable for the determination of water vapor transmission rate of plastic films, composite films and other films and sheet materials. Through the measurement of water vapor transmission rate, the technical indicators of control and adjustment of packaging materials and other products can be achieved to meet the different needs of product applications.
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Dual Vapor Gravimetric Sorption Analyzer
DVS Resolution
DVS Resolution’s key feature is the combined ability to precisely control and measure temperature and relative humidity while recording the highest resolution changes in mass. DVS Resolution uses a dry carrier gas typically nitrogen or compressed air for its operation. Digital mass flow controllers regulate flows of dry and saturated gases. Relative humidity is generated by precisely mixing dry and saturated gas flows in desired flow ratios which produce expected relative humidity. In a typical experiment a known concentration of water vapor is delivered over a sample placed inside the sample pan connected to the Surface Measurement Systems Ultrabalance™ measuring realtime mass changes caused by sorption or desorption of water molecules. Prior to sorption measurements, the sample can be in-situ preheated/dried at temperatures of up to 300oC.
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Vapor Source Mass Flow Controller With Viscous Laminar Flow
The 1152C Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.
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Vapor Mass Flow Controllers
Heated pressure-based mass flow controllers are designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
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Water Vapor Sorption Analyzer
DVS Adventure
DVS Adventure is a water vapor sorption analyzer that measures sorption and desorption isotherms over a broad range of humidities and temperatures. It offers unprecedented temperature stability and humidity performance.
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Crude Oil Package for Vapor Pressure
The GRABNER INSTRUMENTS' Crude Oil Package is a comprehensive solution for the transport and measurement of the vapor pressure of crude oil according to ASTM D6377 (Expansion Method). The unique Floating Piston Cylinder allows safe sample transfer of “live crude oils” according to ASTM D3700 and eliminates the risk of evaporation of light hydrocarbon ends during transport. The Grabner Instruments crude oil package is also strictly in accordance with the Russian standard GOST 52340.
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Cold Vapor Atomic Absorption (CVAA) Mercury Analyzer
QuickTrace M‑7600
The QuickTrace® M-7600 Cold Vapor Atomic Absorption (CVAA) Mercury Analyzer easily achieves the ultra-trace mercury detection limit of <0.5 ng/L. The QuickTrace® M-7600 is ideal for ultra-trace to sub-mg/L mercury quantitation. The M-7600 is designed for routine and research use in a variety of settings, including environmental laboratories, industry, and research institutes, for virtually any aqueous acidified sample.
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Dynamic Ultra Micro Hardness Tester
DUH-210/DUH-210S
A new evaluation system for measuring the material strength of micro regions, such as semiconductors, LSI, ceramics, hard disks, vapor deposited films, and thin coating layers, not addressed by previous hardness testers. It can also be used to evaluate the hardness of plastics and rubbers. This instrument uniquely measures dynamic indentation depth, not the indentation after the test. This in turn permits measurement of very thin films and surface (treatment) layers that are impossible to measure with conventional methods. Additionally, this same method supplies the data needed to calculate elastic modulus on the test specimens.
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Cold Vapor Atomic Fluorescence (CVAF) Mercury Analyzer
QuickTrace M‑8000
The QuickTrace® M-8000 Cold Vapor Atomic Fluorescence (CVAF) mercury analyzer is ideal for ultra-trace to sub-mg/L mercury quantitation. Due to the high sensitivity of the M-8000, it easily achieves the ultra-trace detection limit of <0.05 ng/L total mercury that is demanded by customers following EPA method 1631. The QuickTrace® M-8000 is also versatile enough to analyze samples >400 µg/L without dilution in a research or industrial setting.
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Dynamic Vapor Sorption Analyzer
IGAsorp-XT
The IGAsorp-XT is a fully automated water sorption analyzer designed for measurements at temperatures and humidities beyond those available with conventional DVS analyzers. High resolution sorption isotherms are recorded at humidity values from 0.2 %RH or lower, using the unique climate-XT control method. Combined with high temperature water sorption measurements to 300 °C, an integrated pre-heater and completely flexible method programming, the IGAsorp-XT is the world’s most advanced benchtop DVS analyzer.
