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Ozone
Trioxygen
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Process Ozone Sensor
Model 452
Teledyne Advanced Pollution Instrumentation
The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is a standard feature.
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Ultra Clean, High Concentration, High Flow Ozone Generator
SEMOZON® AX8415
The SEMOZON® AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, high concentration, high flow ozone is produced by this generator's novel architecture and patented cell design, converting oxygen to >400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display and photovoltaic industries.
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Portable Trace-Level O3 Calibrator
Model T753U
Teledyne Advanced Pollution Instrumentation
The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U Portable Multigas Calibrator platform. The T753U is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field for virtually any application. An internal zero air option extends the T753U's capabilities to also provide a clean and dry source of zero air, eliminating the need for a separate source of zero air. The internal zero air source module contains a software driven electronic inlet valve manifold allowing the calibrator to automatically switch between internal and external zero air sources depending on the application needs.
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Laboratory Ozone Test Chamber
CX-150
Shenzhen Chuangxin Instruments Co., Ltd.
Laboratory Ozone Test chamber is widely used to control products quality in measuring quality control; Rubber & Plastics; automobile production; wire and cable; packing materials; instruments and meters; medical equipment; civilian nuclear energy; civil aviation; colleges and universities; research laboratories; inspection arbitration, and technical supervision departments and other rubber products.
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Ozone Climatic Test Chamber
The Ozone Test Chamber provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone. The equipment works by exposing the test samples to uniform concentrations of ozone at constant temperatures and relative humidity in a sealed air environment. Under these conditions, the products undergo the process of corrosion which can be observed in the form of surface cracks and changes in other properties.
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Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Ozone Concentration Tester
OCT-3 PRO
Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
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Air Quality Meters
An indoor air quality meter is used in confined spaces to prevent mold, to monitor CO2 levels, or to detect gas leaks. Whether portable or fixed, handheld or wall mounted, air quality monitoring equipment is essential for ensuring health and safety. At PCE Instruments, you will find air quality monitoring devices that meet various industry standards relating to personal safety and that are used to detect, measure and monitor relative humidity, ambient temperature and / or levels of carbon dioxide (CO2), volatile organic compounds (VOCs), formaldehyde (HCHO), freon and other refrigerants (CFC / HFC), phosphine (PH3), hydrogen sulphide (H2S), carbon monoxide (CO), nitrogen dioxide (NO2), oxygen (O2), ozone (O3) and other flammable, hazardous or toxic gases.
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PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Plastics Testing Equipment
Dongguan Amade Instruments Technology Co., Ltd
Plastics testing equipment include a series of instruments intended to carry out testings of component analysis, formula analysis, performance determination, aging resistance test etc on various plastic materials and plastic products in accordance with ISO, ASTM, DIN, HB international standards. Mechanical & physical & chemical property testings include tensile strength, bending strength, friction coefficient, creep resistance property, tearing strength, shearing property, impact resistance property, compression performance, hardness, resilience property, fatigue strength, melt index, heat deflection temperature, melt viscosity, density, flammability characteristics, resistance to aging under UV, xenon, ozone, high/low temperature etc.
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Dissolved Gas Systems
Dissolved gas in deionized water has been widely adopted in manufacturing processes in Electronics, Semiconductors, Flat Panel Displays and Solar applications. These wet techniques increase manufacturing productivity in particle lift-off and wet clean operations. Dissolved gases such as Ammonia, Carbon Dioxide and Ozone are environmentally friendly alternatives to heavy chemicals like sulfuric acid and peroxide acid solutions. MKS offers a large product line of Dissolved Gas systems that improve wet cleaning operations.
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Trace-Level Photometric Ozone Calibrator
Model T703U
Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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Rubber Testing Equipment
Dongguan Amade Instruments Technology Co., Ltd
Rubber testing equipment are used to test the physical properties, chemical properties, thermal properties of uncompounded and compounded rubbers at prescribed conditions to help manufactures or researchers in comprehending the characteristics, updating the formula and improving product quality. Including volatile component, ash content, Mooney viscosity, vulcanization curve, Mooney scorch time, hardness, tensile properties, tearing, the compression performance, impact, friction resistance, fatigue resistance, peel strength, vertical & horizontal combustion, smoke density, limiting oxygen index, the flame spread rate, the surface resistance, surface resistivity, volume resistivity, the breakdown voltage, dielectric strength, dielectric loss, antistatic properties, Aging test (UV, Xenon lamp, carbon arc lamp, ozone) etc.
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Dissolved Ozone Analyzer
Model 470
Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Ozone Test Chamber
EKT-2001OZ-HCSLT
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Professional Mobile Photometer
P34
The photometer P34 Professional meets all the requirements of modern water analysis. The device has a backlit display. Measuring range, reagent type as well as an automatic countdown timer for accurate response times are displayed. The internal memory stores up to 1,000 events with date, time and sample ID. The data can be retrieved at any time and transferred via an optional infrared module. The photometer P34 Professional serves, among others, to detect alkalinity, aluminum, bromine, chlorine, chlorine dioxide, chlorite, cyanuric acid, iron, urea, hardness, iodine, copper, sodium hypochlorite, ozone, PHMB, phosphate, pH, oxygen, acid, sulphate and hydrogen peroxide using various methods.
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Process Ozone Monitor
Model 465M
Teledyne Advanced Pollution Instrumentation
The Model 465M is a microprocessor based medium range ozone monitor for measuring process ozone concentrations in water treatment, food processing, and research applications. The design has been specifically optimized for applications requiring the measurement of ozone at near-ambient pressure such as water treatment contactor off-gas measurement. The Model 465M has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465M is available in a NEMA 4X wall mount enclosure.
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Test Chambers
Drug test chamber, ozone test chamber, plant grown chamber, salt spray test chamber, sand test chamber, temperature and humidity test chamber, UV test chamber, xenon test chamber
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Transmitter
5081
The Model 5081 family of transmitters can be used to measure pH, ORP, conductivity (using either contacting or toroidal sensors), resistivity, oxygen (ppm and ppb level), free chlorine, total chlorine, and ozone in a variety of process liquids.
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Trace-Level Dilution Calibrator
Model T700U
Teledyne Advanced Pollution Instrumentation
The Model T700U is a microprocessor based calibrator for precision, trace-level gas analyzers. Using highly accurate mass flow controllers combined with compressed sources of standard gases, calibration standards are provided for multipoint span and zero checks using up to 4 gas sources.In addition to the features of the Model T700, the Model T700U is designed for the demanding requirements of trace-level measurements. The ability to calibrate and verify linearity for NO2 at levels below 50 ppb is difficult with standard calibrators. To overcome this limitation, the Model T700U ozone generator operates in two modes; a high range with similar performance to the Model T700 ozone generator, and a low range, or "fractional" mode, for producing accurate ozone levels down to 3 ppb. To ensure the highest accuracy of NO2 output, the calibrator measures the ozone concentration prior to performing a GPT, and the range is selected automatically by the Model T700U based on ozone concentration and flow specified by the user.
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Catalytic Ozone Destructs
CAT-O3 Series
Teledyne Advanced Pollution Instrumentation
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
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High-concentration, High Flow Ozone Generator
SEMOZON® AX8407
The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.
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Portable Gas Calibrator
Model T750
Teledyne Advanced Pollution Instrumentation
The Model T750 is a portable, microprocessor based calibrator for precision gas analyzers. Using highly accurate mass flow controllers combined with compressed sources of standard gases, calibration standards are provided for multipoint span and zero calibrations. The T750 is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field.The Model T750 can be equipped with an optional UV ozone generator for accurate, dependable ozone calibrations, and production of NO2 when blended with NO gas in the included, internal gas phase titration (GPT) chamber. An optional photometer allows even more precise control of the ozone generator giving accurate and dependable ozone calibrations and enhanced GPT. A number of calibration sequences may be programmed into the non-volatile memory of the Model T750, covering time periods up to a year.
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Dissolved Ozone Instruments
Teledyne Advanced Pollution Instrumentation
For measuring dissolved ozone concentrations in water a microprocessor controlled instrument can be used for automatic and continuous measurement by means of an disinfectant sensor. All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring.
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Ozone 2 Click
64209
Ozone 2 click is an ozone detection (O3) sensor, based on the MQ131 gas sensor.
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UV Absorption O3 Analyzer
Model T400
Teledyne Advanced Pollution Instrumentation
The Model T400 UV Absorption analyzer uses a system based on the Beer-Lambert law for measuring low ranges of ozone in ambient air.A 254 nm UV light signal is passed through the sample cell where it is absorbed in proportion to the amount of ozone present. Periodically, a switching valve alternates measurement between the sample stream and a sample that has been scrubbed of ozone. The result is a true, stable ozone measurement.
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Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Ozone Test Chamber
EKT-2001OZ-HCLSX
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.