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Ozone
Trioxygen
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Ozone Generators & Systems
MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Ozone Concentration Tester
OCT-3 PRO
Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
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Process Ozone Sensor
Model 452
Teledyne Advanced Pollution Instrumentation
The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is a standard feature.
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Chemitec Sensors And Analyzers To Monitor Oxidants In Water
Chemitec's S494 series of amperometric probes provide continuous, accurate monitoring of chlorine and other oxidants in clean water applications. A range of sensors assures accurate measurement of oxidation, with sensors optimized for Chlorine (total, organic or inorganic), Chlorine Dioxide, Ozone, Peracetic Acid, Hydrogen Peroxide, Bromine, or Chlorites.
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Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Single/Multi-Channel Industrial Safety Ozone Monitor
Model 465L
Teledyne Advanced Pollution Instrumentation
The Model 465L UV Photometric Ozone Monitor is an extremely stable analyzer, ideal for critical low-level ppm safety and process applications. Its calibration is NIST traceable and the included pressure and temperature compensation ensure high accuracy under all conditions.
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Ozone Test Chamber
EKT-2001OZ-HCSLT
Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Broadband Xe Light Source
PowerArc
75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Dissolved Ozone Instruments
Teledyne Advanced Pollution Instrumentation
For measuring dissolved ozone concentrations in water a microprocessor controlled instrument can be used for automatic and continuous measurement by means of an disinfectant sensor. All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring.
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Process Ozone Monitor
Model 465M
Teledyne Advanced Pollution Instrumentation
The Model 465M is a microprocessor based medium range ozone monitor for measuring process ozone concentrations in water treatment, food processing, and research applications. The design has been specifically optimized for applications requiring the measurement of ozone at near-ambient pressure such as water treatment contactor off-gas measurement. The Model 465M has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465M is available in a NEMA 4X wall mount enclosure.
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Compact Ozone Monitor
Model 430
Teledyne Advanced Pollution Instrumentation
Teledyne API, a recognized leader in Ozone measurements, is pleased to offer the Model 430 O3 Monitor. The 430 is a compact instrument that uses the proven UV-absorption principle. The small footprint and robust design make it ideal for a variety of applications where portability and accuracy are both necessary.
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Waterproof Ozone Tester
ORPTestr 10
Large Display Screen - dual display LCD for enhanced readability, provides comprehensive meter information
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High-concentration, High Flow Ozone Generator
SEMOZON® AX8407
The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.
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Ozone Climatic Test Chamber
The Ozone Test Chamber provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone. The equipment works by exposing the test samples to uniform concentrations of ozone at constant temperatures and relative humidity in a sealed air environment. Under these conditions, the products undergo the process of corrosion which can be observed in the form of surface cracks and changes in other properties.
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Process Ozone Monitor
Model 465H
Teledyne Advanced Pollution Instrumentation
The Model 465H is a microprocessor based high concentration ozone monitor for measuring ozone in process gas streams in water treatment, food processing, and research applications. The 465H has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465H is available in a NEMA 4X wall mount enclosure.
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Ozone Test Chamber
Wewon Environmental Chambers Co, Ltd.
provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone.
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Dissolved Ozone Analyzer
Model 470
Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Dissolved Ozone Monitor
HZ-960
High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
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Catalytic Ozone Destructs
CAT-O3 Series
Teledyne Advanced Pollution Instrumentation
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
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Laboratory Ozone Test Chamber
CX-150
Shenzhen Chuangxin Instruments Co., Ltd.
Laboratory Ozone Test chamber is widely used to control products quality in measuring quality control; Rubber & Plastics; automobile production; wire and cable; packing materials; instruments and meters; medical equipment; civilian nuclear energy; civil aviation; colleges and universities; research laboratories; inspection arbitration, and technical supervision departments and other rubber products.
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Ultra Clean, High Concentration, High Flow Ozone Generator
SEMOZON® AX8415
The SEMOZON® AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, high concentration, high flow ozone is produced by this generator's novel architecture and patented cell design, converting oxygen to >400 g/Nm3 of high concentration ozone for leading-edge applications in the semiconductor, flat panel display and photovoltaic industries.
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Ozone Aging Test Chambers
Dongguan Amade Instruments Technology Co., Ltd
Ozone aging test chamber is also called as ozone climate simulator or ozone aging tester. It is one of climatic testing instruments, which is to simulate and intensify the ozone condition for determining the cracking resistance of vulcanized or thermoplastic rubbers when subjected to dynamic or static tensile strain exposed at a man-made constant temperature to atmosphere containing given concentration of ozone in conformance with relevant specification. Ozone test is an indispensable method for people to research effects and mechanisms of ozone on rubbers, quick identify and evaluate anti-aging performance of rubbers and find solutions for improvement of quality and lifespan.
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Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Ozone Test Chambers
Labodam Ozone Test Chambers are designed to detect the concentration of ozone while requiring low maintenance, having well-built corrosion resistant bodies, and while utilizing noiseless generators.
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Trace-Level Photometric Ozone Calibrator
Model T703U
Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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Portable Trace-Level O3 Calibrator
Model T753U
Teledyne Advanced Pollution Instrumentation
The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U Portable Multigas Calibrator platform. The T753U is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field for virtually any application. An internal zero air option extends the T753U's capabilities to also provide a clean and dry source of zero air, eliminating the need for a separate source of zero air. The internal zero air source module contains a software driven electronic inlet valve manifold allowing the calibrator to automatically switch between internal and external zero air sources depending on the application needs.
