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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Manufacturing / Processing Testing & Analytical Solutions
Thermo Fisher Scientific has developed a range of process, testing, and analytical solutions for semiconductor and integrated circuit manufacturers, petrochemical refineries, steel, aluminum, plastics, rubber, and nonwovens manufacturers, water analysis facilities, and more—all aimed at helping you achieve your business goals. Flow Measurement, Density Measurement, Level Measurement, Metals Coating Weight & Thickness Measurement Gauges, Moving Web Thickness & Weight Measurement Systems, Process Mass Spectrometers, Gas Moisture & Sulfur Analyzers, Petroleum Testing, Natural Gas Testing.
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Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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Bench-top Microreactor & Combined Mass Spectrometer System
CATLAB-PCS
The Hiden CATLAB is a bench-top microreactor and combined mass spectrometer system for rapid and reproducible catalyst characterisation and reaction studies. The modular benchtop system features an advanced fast-response low thermal mass 1000oC furnace, multistream gas flow control of up to eight integrated gas streams, together with the precision Hiden quadrupole gas analyser.
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Flow Computers & Remote Controllers
ABB is the expert in low power and high-accuracy control devices for the remote production and custody transfer of oil and gas, offering the X-F.A.C.T.O.R. in flow computing.Easy installation, minimal intervention, and years of experience with real-world applications have helped to build greater efficiency into every function of ABB flow computers, remote controllers & RTUs (remote terminal units).
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Miniature Flow Sensor For Gas Lapiflow (R)
FSM
Ultra-compact flow sensor for compressed air and nitrogen gas.Since it is lightweight and responds quickly, it is ideal for confirming the adsorption of electronic parts.
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Ultra-thin Mass Flow Controller
DZ-100
The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Dual Pitot Tube Flow Meter
PTFM-ONE-DT
The Dual Pitot Tube Flow Meter, PTFM-ONE DT is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers, with a sampling rate of 1kHz to accurately measure highly pulsating exhaust flows. This rapid capture rate ensures that any pulsations or exotic behaviour caused by the engine is measured, and the unique design of the PTFM-ONE DT means reverse flows can be calculated, with the same guarantee of sensitivity.
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Square Root - Gauge Line Error Indicators
Parker PGI's SRE6 and GLE6 Indicators are designed to quantify Square Root and Gauge Line Errors in natural gas orifice flow measurement. They identify inaccuracies caused by compressor-induced pulsation and differential pressure discrepancies.
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Gas Distribution Panels
PTS DII
PTS DII Gas Distribution Panels are similar to our PAO-DII Fluid Distribution Panels. They are designed to individually distribute, monitor, and protect one or more of your valuable products from the higher than required flow of a larger PTS, Portable Temperature Servo Conditioner or HPG, High Pressure Gas Conditioner. You can also use PTS-DII Gas Distribution panels with any other source of temperature controlled gas, including a competitor's air or gas source.
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Pitot Tube Flow Meter
PTFM-1000V2
The Pitot Tube Flow Meter, PTFM-1000V2 is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers to accurately measure highly pulsating exhaust flows with a sampling rate of 1kHz. This rapid capture rate ensures that any pulsations or exotic behaviour in an engine is measured, and the unique design of the PTFM pitot tube means reverse flows can be measured with the same guarantee of sensitivity. The interface can be run standalone with a laptop, or seamlessly integrated to run alongside an analyser system without adding any more steps to the test cycle process.
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Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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CEMS
FMD 09
IMR Environmental Equipment, Inc.
The continuous measurement of velocity and temperature of gas flows is much important at operation of a system with flowing gases (e.g. hall outlet air, exhaust etc.).
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Portable Servo Conditioners
PTS-V
Bemco PTS-V Portable Servo Conditioners provide a closed loop flow of controlled temperature air or gas to an insulated enclosure or structure. Bemco high pressure gas servo conditioners provide air or gas at up to two atmospheres of pressure to heat exchangers and thermal shrouds. Bemco HPG High Pressure Gas Conditioners are described on a separate page.
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Evaluation Kit for Differential Pressure Sensors of the SDP3x Series
EK-P4
The evaluation kit EK-P4 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's SDP3x differential pressure sensors. Test now the features of the new differential pressure sensor. Especially at lowest pressure differences, the sensor provides highest accuracy and long-term stability. The evaluation kit EK-P4 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's SDP3x differential pressure sensors. Test now the features of the new differential pressure sensor. Especially at lowest pressure differences, the sensor provides highest accuracy and long-term stability. The evaluation kit consists of a USB stick connected to a PCB on which an SDP3x differential pressure sensor is already attached. The included flow element can be easily affixed to the kit with two screws and then directly connected to the gas flow. Detailed information about the flow element can be found in the application note.
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Miniature Pressure Controller
VSO-GC
Parker VSO-GC is an electronic pressure control unit specifically designed for gas chromatography manufacturers that require low volumetric flow control
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Corrosion Inhibitor Evaluation
ASTM G202
Metals Samples provides solutions to study the performance of corrosion inhibitors in the laboratory. The Rotating Cage is helpful in selecting corrosion inhibitors for use in oil and gas production pipelines and facilities, transmission pipelines, as well as in oil refineries. It simulates aggressive field flow conditions that cause localized pitting corrosion in a simple laboratory setup. The precision, i.e., repeatability and reproducibility, of the rotating cage has been established (ASTM G202).
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Flow Ratio Controllers
Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber.
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Sensors
Panasonic Industrial Devices Sales Company of America
Panasonic Sensor Solutions offer a wide and constantly evolving range of technologies that provide design engineers with the flexibility to easily choose and implement the Sensor technology best suited for existing and ever-emerging new applications all from a single, world class supplier. Panasonic built-in Sensors contribute to energy savings, safety and comfort. With high-functionality and high-performance, Panasonic has solutions for sensing and detecting rotational speed and angle, position, flow, velocity, temperature, magnetism, currents and much more! Panasonic Sensor products combine the latest technologies with plug-and-play devices such as Grid-EYE® Thermopile Array Sensors, the Ultrasonic Gas Flow Sensor, the highly accurate and flexible 6in1 Sensor (6DoF Automotive Inertial Sensor), a wide array of Passive Infrared Motion Sensors (PIRs), and highly specialized and accurate Industrial Sensors.
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Syringe Pump
65x
The 65x syringe pump provides precise, predictable flow and pressure control at flow rates from sub-microliter to 25 mL/min. Exceptional low-flow stability at up to 20,000 psi (1,390 bar) makes this the ideal pump for high pressure applications from deep well core analysis and polymer extrusions. The 65x pumps to the lowest flow rates with zero pulsation available on the market!The SyriXus controller has backlighted keypad and 4-line LCD display, as well as built-in and optional interfaces for computer control and other devices. Programming is easy and flexible, with instant access to menu screens even when the pump is running. This allows you to change operating parameters on the fly. Control the pump remotely using driver for LabVIEW™ software, in addition to pump controller. The 65x pump module has a single-ratio drive train with autolubricating gears for long life and low maintenance. Special fittings are used to prevent leaks and ensure safety at maximum pressure. Wetted materials are compatible with most aqueous and organic liquids, corrosive solutions, heated fluids, liquefied gases. Continuous pumping is available in either single or dual pumping system controlled via air valves, offering zero pulsation for unlimited delivery. Trust in the Teledyne LABS SyriXus pumps for proven reliable design. Known for years of performance, it can delivery fluid or pressurized gas for long term experiments. Or hold pressure constant in the system at a simple click of the button.
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Multipoint Sampling Systems
Gasmet Multipoint Sampling System (MSS) is designed for online monitoring of multiple measuring points.The Gasmet MSS consists of a wall-mounted stainless steel case which includes all valves, flow meters, and pump. Standard setup includes one pump with four (4) sample gas input line, but up to 32 lines can be added according to customer need. Additionally, a second sample gas pump can be added to reduce the system response time.
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Gas Flow Sensors
ESRF-ESF Sensor
ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to ±300 ln/min with a total error band of < 1.25% RD. ESRF-ESF gas flow sensors provide calibrated and temperature compensated output on an SPI, I2C bus or analog output making them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided with a multitude of interface and output options so that the right sensor configuration can be selected based on the specific requirements for each application.
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Trace-Level Photometric Ozone Calibrator
Model T703U
Teledyne Advanced Pollution Instrumentation
The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers. Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators. The Model T703U is designed to meet the requirements of ultra-low ozone production.In addition to a high range with similar performance to the Model T703, the Model T703U has the capability to generate ozone in a low range, or "fractional" mode, for producing ozone levels down to 3 ppb, with exceptional accuracy. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperature and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703U, covering time periods up to a year.
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DELTA™ II 2-zone Flow Ratio Controller
The DELTA™ II Flow Ratio Controller divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. It is available with EtherCAT® or DeviceNet™ communications.
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Gas Flow Meters
There are innumerable circumstances where gas flow rates need to be quickly and precisely measured. You’ll always be prepared with Netech’s versatile range of gas flow meters, which are designed to measure several types of gases including air, N2, O2, CO2, and He.
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Hall Effect Measurement system
HMS-3300
Magnetic flux density : 0.55Tesla (+/-0.03T)Gap distance between both round magnets : 26mm / Round magnet diameter : 50mmMeasurable temp : RT ~ 300℃(model# HT55T3). Resolution : 0.1℃(Model# HT55T5 : RT ~ 500℃)Both HT55T3 and HT55T5 are only capable of using with HMS-3000 main body.(Not compatible with HMS-5000 )- You can flow purge gas into small chamber and measure hall effect at the same time. Gas control valve can be installed as an option.
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Vapor Process Gas (VPG) Filters
Filters are an integral piece of your vaporizing system. Conventional high-purity, point-of-use gas filters are used in compressed gas lines for particle removal. MSP’s VPG filters are also uniquely well-suited to be used downstream of a vaporizer under vacuum flow conditions.
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Dual Vapor Gravimetric Sorption Analyzer
DVS Resolution
DVS Resolution’s key feature is the combined ability to precisely control and measure temperature and relative humidity while recording the highest resolution changes in mass. DVS Resolution uses a dry carrier gas typically nitrogen or compressed air for its operation. Digital mass flow controllers regulate flows of dry and saturated gases. Relative humidity is generated by precisely mixing dry and saturated gas flows in desired flow ratios which produce expected relative humidity. In a typical experiment a known concentration of water vapor is delivered over a sample placed inside the sample pan connected to the Surface Measurement Systems Ultrabalance™ measuring realtime mass changes caused by sorption or desorption of water molecules. Prior to sorption measurements, the sample can be in-situ preheated/dried at temperatures of up to 300oC.
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Pneumatic Pressure Transmitters
Deltapi N Series
Deltapi N series includes a range of pneumatic transmitters suitable for reliable measurements of pressure, differential pressure, flow or level of liquids, steam and gas. Deltapi N transmitters provides a wide selection of measuring elements to match required working pressure ratings and calibrated spans.
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Gas Flow Meters & Controllers
Accurate Mass Flow Measurement Sierra designs and manufactures a wide range of today's most advanced analog and digital gas flow meters, mass flow meters, controllers and switches across three core technologies: Capillary Thermal, Immersible Thermal, and Mass Vortex. Each gas flowmeter or controller meets exacting standards, and we can also customize your flow rate sensor to meet application requirements (often free of charge).