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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Digital Readouts & Metrology Tools
HEIDENHAIN digital readouts have universal applications. In addition to standard tasks on milling, drilling and boring machines and lathes, they also can be used with machine tools, measuring and testing equipment, and special machines in fact, they can be used with any machine where axis slides are traversed manually.
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Dimensional Metrology
Stand-Alone Metrology Family
Nova’s stand-alone metrology platforms are utilized to characterize critical dimensions such as width, shape and profile with high precision and accuracy and are used in multiple areas of the fab such as photolithography, etch, CMP and deposition in the most advanced technology nodes, across all semiconductor leading customers.
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Slide Calipers
We recognize that reliable operation and dependable accuracy are essential to your quality and manufacturing operations. As part of our commitment to quality, we have established first generation NIST traceable documentation for all calibration artifacts and standards. Our metrology professionals are available to assist you with whatever you need to keep your system on the job.
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Portable Metrology‑Grade 3D Scanner
Black Series
The HandySCAN 3D | BLACK Series delivers accurate, high-resolution and repeatable results, regardless of the measurement setup quality and no matter the user experience. Featuring dynamic referencing, both the scanner and part can move during measurement and still provide an accurate and high‑quality scan.
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Dimensional Metrology
Nova offers in-line optical integrated and stand-alone metrology platforms. The metrology product portfolio, combined with our modeling algorithm software, delivers unique measurement capabilities for the most advanced semiconductor technology nodes.
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Deep Ultraviolet Spectrophotometer System
VUVAS-10X
A new ultraviolet spectrophotometer system for optical metrology just arrived at NASA Goddard! The VUVAS-10X spectrophotometer works best in the 90 to 160 nanometer wavelength range, also known as deep or vacuum ultraviolet (VUV) region. It uses a windowless hydrogen plasma light source and differential pump section to reach many wavelengths beyond those of conventional deuterium lamps. The source also works with other gases, or gas mixtures, for atomic spectral line emission from about 30 nanometers (double ionized Helium gas) up to the Visible light range. The new spectrophotometer system, McPherson VUVAS-10X, uses a one-meter focal length high-resolution monochromator with the special light source, scintillated detector and Model 121 goniometric sample chamber. The system is ideal for optical transmission, absorbance and specular reflectance at incident angles up to 60 degrees. This McPherson spectrophotometer system will help develop, inspect and qualify optical materials and coatings used for very high altitude and extraterrestrial space flight missions.
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In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Automatic Online Flatness and Surface Appearance System
UltraSort200
The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
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Offline Programming, Advanced Simulation & Digital Twin
Silma
Improve your 3D measurement experience with a winning combination: Silma, for advanced simulation and digital twin of your 3D measurement process, and Metrolog for on-machine execution and analysis.
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3D Scanning Software
Software is a comprehensive component to any advanced metrology system. Combined with laptops and portable equipment, 3D scanning and measurement is now possible virtually anywhere. 3D scanner software plays a critical role in every stage from the creation of a concept design to the manufacturing and inspection of prototypes. Below is a look at some of the Laser Scanner Software and 3D Scanner Software providers and platforms we represent and handle.
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Mid-end
Growth in the advanced packaging market and the challenges raised by the various packaging types requires the highest level of inspection and metrology, ensuring high yields of each die as well as of the whole package.
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Process XRR, XRF, and XRD metrology FAB tool
MFM310
Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
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Atomic Force Microscope
XE-PTR
Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.
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Rotary Positioning
Direct Drive Theta
Our Direct Drive Theta (DDT) rotary stage units feature a compact mechanical design that makes them easy to integrate into metrology systems and other machines that need precision positioning.
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CT PT Tester
HTFA-107 / 340
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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PHOTO-2000m M-LUX Meter
Hangzhou Everfine Photo-E-Info Co., LTD
Designed for low illuminance testing above 10-4 lx. The standard CLASS A photometric detector with pre-amplification is adopted, which greatly improves the output signal quality of the detector. At the same time, the industry's advanced level of m-lux detection technology, better stability, suitable for darkroom, photo photocopying room, metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
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Horizontal Calibration Instruments (Lab)
Labconcept Nano
The Labconcept Nano is a new reference in the field of dimensional metrology. It integrates 40 years of knowledge and continuous improvement. It is a remarkable instrument for all measuring tasks that require extremely high accuracy.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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Surface Analysis
Dimension AFP
The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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Semiconductor Solutions
Bruker's suite of technologies for semiconductor manufacturing address critical metrology and process needs across the broadest range of applications from R&D to process improvement. 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation products.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition. In applications ranging from C-S thin films materials characterization to wafer substrate analysis and defect detection, Bruker’s systems provide simulation analysis and fit. HRXRD, XRR, WA-XRD, and XRDI measurement types are fully supported, enabling researchers, production engineers, and process developers unparalleled capabilities. Whether you are a semi and C-S fabricator, R&D center or academy, or an industry materials research facility, Bruker has a specifically designed solution for your metrology needs.
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Gauges & Calibrators
Ralston Instruments' gauges and calibrators are born from decades of experience working with technicians, project managers and facilities teams responsible for maintaining metrology instruments.
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Xytronic Single-Phase Reference Standard +/- 0.04%, +/- 0.02%, +/- 0.01%
RADIAN RX-20, RX-21 and RX-23
Radian Research is committed to providing our customers with leading innovative and technologically superior products, while maintaining metrology capability in power and energy measurement that is surpassed by none. Our engineers drew on the expertise and knowledge we acquired for our industry-leading legacy RM (Metronic) and RD (Dytronic) reference standards to develop the RX (Xytronic), the ultimate in power and energy measurement technology perfection.
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Wavefront Measurement Systems Using the Shack-Hartmann Sensor
Lumetrics has applied the ingenious Shack-Hartmann sensor to a range of wavefront measurement systems ideal for analyzing optics-related products and materials, from contact lenses to intraocular lenses to laser beam analysis, surface measurement, and phase parameters. While Shack-Hartmann technology may be widely adopted in the wavefront metrology industry, Lumetrics has applied the technology in unique ways and added industry-leading hardware and software features to our systems that offer you significant advantages over our competitors.
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Colorimeter Measurement
DRK8620
Shandong Drick Instruments Co., Ltd.
WSC-S Colorimeter measurement is a superior performance, versatile and convenient operation colorimeter,suitable for the determination of various objects reflection color, whiteness test, chromaticity and color object with two objects. It is equipped with a geometry test head, that the provisions of CIE 0 / d. WSC-S Colorimeter measurement with two portable desktop, digital display, and available for print. The instrument can be widely used in textiles, dyes, printing and dyeing, paper, building materials, ceramics, food, printing, metrology and other departments.
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Length Gauges
HEIDENHAIN length gauges deliver high accuracy, even over large measuring ranges. They are commonly used wherever fast, reliable, and accurate measurements are required, such as in production metrology, multi-gauging fixtures, measuring equipment monitoring, and position measurement.
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Water Meter Test Bench
VM5-DN15-50MM
Shanghai Powoo Industry Develop Group Limited
The tester bench is the necessary measure instrument for the test and repair of water meter in metrological service, water meter manufacture, water supply company, industrial and mining establishments.
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Optical Gaging Products
Quality Vision International Inc.
OGP® pioneered multisensor measurement with vision, touch probe and laser sensors. For over 75 years, OGP has consistently led with a succession of innovative systems and sensors to tackle the most difficult measurement challenges, especially as it pertains to the medical industry. Multisensor metrology is a preferred quality control technology for manufacturers to develop, maintain, and improve the quality of medical devices.
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Packaging Manufacturing
KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Non Contact Measurement
There is no one-size-fits-all solution for accurate measurement, and different applications require different measurement systems. At Vision Engineering, we design and manufacture a broad range of non-contact measurement systems from toolmakers’ measuring microscopes to fully automated CNC video measuring systems with optional contact measurement available. Combined with the latest metrology software solutions available, we offer the right tool for the job.
