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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Generators
Classical Shock
Software Classical shock is used for testing specimen resistance to shock impact. As the Software Classical shock is activated, at the output of shaker control system ZET 017-U there is formed a signal with pre-set parameters. Types of signals generated:
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UV Plasma Sources
UVS300|UVS 10/35
The UVS300 and UVS 10/35 are UV Plasma sources with high intensity, working with different gases.
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Signal Generators
SSG3000X Series
SIGLENT’S SSG3000X series of signal generators have a frequency range of 9 kHz to 2.1 GHz/3.2 GHz. They provide normal analog modulation such as AM, FM, and PM. They also provide pulse modulation and pulse train generator. In addition, when used with baseband generator such as SDG6000X, They can generate IQ modulated signals. With their high accuracy and pure outputs, the SSG3000X series is the right choice for R&D, education, and manufacturing.
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Comb Generators
Keysight comb generators provide excellent phase and amplitude flatness making them ideal for use in phase calibration applications. A customer selectable USB-controlled frequency divider which allows for broad range of input signal frequencies from 10 MHz to 67 GHz and small minimum tone spacing of 10 MHz, makes Keysight comb generators suitable for characterizing non-linear devices.
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RF Generators
Produce radio frequency (RF) signal for device evaluation and fault detection.
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Function Generators
PGP Electronics Private Limited
PGP Electronics Function Generators are a reliable source for different waveforms. Two units, function generator and frequency counter are integrated in to one unit. The built-in frequency counter can also be used to measure the external frequency.
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Signal Generators
Kuhne electronic Signal Generators are available in the following variations:RF Generator as Compact Module in the form factor of a power amplifier (frequency and power can be adjusted)Laboratory Instrument for immediate use with self-explaining user interface for adjustment of frequency and power as well as multiple monitor information possibilities
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Waveform Generators
PeakTech Prüf- und Messtechnik GmbH
Produce repetitive waveforms for analysis of devices that employ them.
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E-Field Generators
TDK E-Field Generators - generate controlled, high-intensity electric and magnetic fields over the frequency range of 10kHz to 100 MHz
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Signal Generators
LA19-15-04
We offer a multi-decade signal generator capable of operation to 8 GHz. Our new versatile and affordableLA19-15-04 instrument operates from 300 kHz to 8 GHz with sub Hz step size and with a 10 ppm settling time of 45 us for any size tuning step.
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Generators
Noise Generator
The noise type to be generated is to be selected from the context menu: right-click the section with the noise name and select the noise type you need.
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Counters & Generators
Are used in various industries to create signals that simulate behavior of system. Counters are instruments for measuring frequency.
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Chemical Downstream Plasma Source
The AX7610 is a microwave plasma source for remote plasma applications. With replaceable quartz or sapphire plasma tubes, the AX7610 downstream source offers configuration flexibility to meet the most demanding application process parameters. The quartz tube version is ideally suited for production of atomic oxygen, nitrogen or argon. The sapphire tube version is compatible with much more severe CF4 CHF3 and NF3 chemistries.
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Generators and Sources
For general purpose standalone applications or as core components in a high speed test and measurement system, Yokogawa sources and signal generators are highly accurate and functional. The integration of source and measurement into a single unit greatly simplifies the test process. Semiconductor devices, sensors, displays or batteries etc can therefore be quickly and easily characterized.
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Function/Arbitrary Waveform Generators
SDG800 Series
The SDG800 series function/arbitrary waveform generator family outputs waveform functions up to up to 5 MHz (pulse), 10 MHz (square), 30 MHz (sine) and has a sampling rate of 125 MSa/s. They are powered with SIGLENT’s EasyPulse technology which produces low jitter, fast rising/falling edges without being affected by frequency, even at low duty cycle settings, allowing the user a wide range of pulse widths and transition times. This results in a much more versatile generator than other similar DDS designs.
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Pulse Generators
Dedicated analogue pulse generators and function generators with true pulse capability.
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Plasma Emission Detectors for Gas Chromatographs
Our patented Plasma Emission Detector is available for integration into any gas chromatography system or installation. It has been designed for ‘plug and play’ installation and to allow for analysis of impurities from PPB to % levels using either capillary or packed columns.
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Arbitrary / Function Generators
Today's designs are often complex, demanding a variety of stimulus signals during test. With standard waveforms, arbitrary waveform capability and signal impairment options, a Tektronix Function Generator supports a wide range of application needs with one instrument. Best-in-class Function Generator performance from Tektronix AFGs ensures signals are accurately reproduced.
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Inductively Coupled Plasma Emission Spectroscopy
Inductively Coupled Plasma Emission Spectroscopy
