Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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6GHz Four Channel Signal Generator 19" 1U Rack Module
LS6084R
Signal Generator
The LS6084R, 6GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
PXI Three Channel Function Generator
41-620-003
Function Generator
The 41-620 is a compact 3 channel function generator provided in a PXI 3U single slot module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. The 41-620 can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
Waveform Generator
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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12GHz Single Channel Signal Generator
LS1291B
Signal Generator
The LS1291B is a 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Clock Generator Module
M8008A
Clock Generator
The M8008A is designed as sample clock source for the M8199A 128/256 GSa/s Arbitrary Waveform Generator. It can also be used as a standalone low-jitter clock source for other applications. It comes as a 1-slot AXIe module, which allows the M8008A plus up to two M8199A AWG modules to be plugged into a single 5-slot AXIe chassis.
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9GS/s 16Bit 8GS Mem 4CH 8 Markers RF AWG Desktop
P9484D
Waveform Generator
The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient and cost effective solution.
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9GS/s 8 Bit, 4GS Mem 4CH 16 Markers AWG
P9084B
Waveform Generator
The Proteus P9084B, is a 9GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9084B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5423, 40 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785116-01
Waveform Generator
The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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12GHz Dual Channel Signal Generator 19" 1U Rack Module
LS1292R
Signal Generator
The LS1292R, 12GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1292R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1292R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers Arbitrary Waveform Generator
P1282B
Waveform Generator
The Proteus P1282B, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1282B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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20GHz Single Channel MW Signal Generator 19" 1U Rack
LSX2091R
Signal Generator
The LSX2091R is a 20GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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3GHz Single Channel Portable Signal Generator
LS3081P
Signal Generator
The LS3081P, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS3081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
Waveform Generator
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Waveform Generator, 20 MHz, 2 Channel
EDU33212A
Waveform Generator
The EDU33212A dual channel function / arbitrary waveform generator provides uncompromising performance for dual channel synchronized test output signals.
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Waveform Generators
Waveform Generator
Drive your test systems forward with PXI instruments from Astronics. Small size, power-packed, and cost-effective, these waveform generators provide the perfect upgrade for your test bench.
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PCI-5402, 20 MHz Bandwidth, 14-Bit Waveform Generator Device
779656-01
Waveform Generator
The PCI‑5402 can generate standard functions, including sine, square, triangle, and ramp as well as other signals like pseudorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Waveform Generator, 30 MHz, 2-Channel with Arb
33522B
Waveform Generator
Keysight 33500B Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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Dual Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282M
Waveform Generator
The Proteus P1282M, is a PXIe based, 1.25GS/s, dual channel arbitrary waveform generator. The P1282M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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12GHz 16-Channel Signal Generator 19" 3U Rack Module
LS12916R
Signal Generator
The LS12916R, 12GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS12916R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS12916R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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PXIe-5433, 80 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785117-01
Waveform Generator
The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
