Plasma Generators
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Product
6GHz Single Channel Portable Signal Generator
LS6081P
Signal Generator
The LS6081P, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS6081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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40GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX4092R
Signal Generator
The Lucid-X is a small footprint modular microwave signal generator that is available in multiple form factors, including Desktop, PXIe module, benchtop, rackmount, and portable. It has been designed to provide low phase noise, with a frequency range all the way up to 40GHz.
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PXIe Vector Modulator
M9316A
Waveform Generator
The M9316A PXIe Vector Modulator is a 3-slot module with integrated wideband IQ modulator and arbitrary waveform generator (AWG) designed to work with the M9383A PXIe Microwave Signal Generator. When ordered with M9383A, it can support 1MHz to 20 GHz frequency coverage, up to 160 MHz RF bandwidth, and up to 1 Giga-sample of AWG playback memory. (See M9383A PXIe Microwave Signal Generator options.
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PXI Three Channel Function Generator
Function Generator
Our PXI Function Generator is capable of generating sine, square and triangle waveforms to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. It can generate fast swept frequency signals, permitting the output to emulate the operation of variable speed devices. The module can also generate arbitrary waveforms loaded into its internal 256k memory, allowing the emulation of many waveform types including the typical waveforms of automotive and aerospace sensors.
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PXI-5421, 43 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
778697-01
Waveform Generator
43 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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Product
Waveform Generator, 20 MHz, 1-Channel
33509B
Waveform Generator
The 33509B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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Product
VXI Waveform Generators
Waveform Generator
Astronics Test Systems offers VXI Arbitrary Waveform Generators with a long, reliable heritage for military use.
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Product
20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
Signal Generator
The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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9GS/s 8Bit, 4GS Mem 4CH 16 Markers AWG
P9084D
Waveform Generator
The Proteus P9084D, is a 9GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9084D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
Waveform Generator, 30 MHz, 1-Channel
33519B
Waveform Generator
The 33519B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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MXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5181B
Signal Generator
Take your devices & designs to their limit with outstanding hardware performance, including unmatched phase noise & spurious characteristicsDrive power amplifiers & characterize nonlinear behavior with industry-leading output powerThoroughly test receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityLower your cost of ownership with 3-year cal cycles & comprehensive solutions for self-maintenance
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2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
Waveform Generator
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Pulse Pattern Generator, 3.35 GHz, dual-channel
81134A
Pulse Generator
When timing and performance requirements are critical, for example in high-speed serial bus applications like PCI Express or Serial ATA, its fast rise times and low intrinsic jitter allow the precise and in-depth characterization of devices, e.g. receivers or backplanes. On top of that, it allows to generate application-specific signal levels like pre- and de-emphasis (PCI Express) or squelch (Serial ATA). The Keysight 81134A lets you test your DUT instead of the pulse or data source!
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PXIe CW Source, 1 MHz to 3 GHz or 6 GHz
M9380A
Signal Generator
Save floor space with a compact, modular analog signal generator Provides Keysight quality and performance for local oscillator (LO) substitution, interference and component test Minimize need for external amplification with output power of +18 dBm across the frequency range Reduce test time with easy integration into your high-speed automated test system
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Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-03
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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PXI/PXIe Arbitrary Generators
Waveform Generator
The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
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Product
Arbitrary Function Generator
HMF2525/HMF2550
Function Generator
Powerful pulse generator Provides pulses with a recurrence rate of up to 12.5 MHz/25 MHz; the pulse width can be set from 15 ns to 999 s with a resolution of 5 ns. Rise/fall time can be selected from 8 ns to 500 ns – a very useful feature when characterizing input hysteresis of semiconductor devices Easily create arbitrary waveforms Arbitrary waveforms can be developed with PC software. Stored waveforms can be loaded via front USB port or imported via the complimentary HMExplorer software (available for download)
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Signal Generator Adapter Module For FlexRIO
Signal Generator
Signal Generator Adapter Modules for FlexRIO feature either high or low‐speed analog output and can be paired with a PXI FPGA Module for FlexRIO or the Controller for FlexRIO for custom signal generation. Whether you need to dynamically generate waveforms on the FPGA or stream them across the PXI backplane, these adapter modules are well suited for applications in communications, hardware‐in‐the‐loop (HIL) test, and scientific instrumentation.
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Product
Comb Generator, 10 MHz to 26.5 GHz
U9391C
Comb Generator
The Keysight Technologies, Inc. U9391C comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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PXIe-5423, 40 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785116-01
Waveform Generator
The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
