Plasma Generators
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Product
RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Product
High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Product
Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Product
EXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5171B
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Achieve faster throughput and greater uptime with the cost-effective performance optimized for manufacturing testPerform basic parametric testing of components and functional verification of receivers with industry-leading output powerThoroughly verify receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityMinimize downtime and expenses with self-maintenance solutions and low-cost repairs
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Product
Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing
T3AWG2152-D
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Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing.
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Product
1.25GS/s 16Bit 1GS Mem 12CH Arbitrary Waveform Generator
P12812B
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The Proteus P12812B, is a 1.25GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P12812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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MXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5181B
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Take your devices & designs to their limit with outstanding hardware performance, including unmatched phase noise & spurious characteristicsDrive power amplifiers & characterize nonlinear behavior with industry-leading output powerThoroughly test receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityLower your cost of ownership with 3-year cal cycles & comprehensive solutions for self-maintenance
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Product
PXIe-5423, 40 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785115-01
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The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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PXIe I/Q Arbitrary Waveform Generator, 16 bit, 540 MHz, 3 Scalar Channels
M9336A
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The M9336A AWG delivers exceptional performance for creation of complex wideband waveforms. Multiple, 540 MHz bandwidth channels with 16-bit resolution and up to a 1.28 GSa/s sampling rate are provided in a single-slot PXIe instrument. This enables the AWG to generate wide bandwidth signals with low Error Vector Magnitude (EVM), making it ideal for creating baseband waveforms for wireless communications, radar, and satellite. The M9336A can also be combined with a wideband I/Q upconverter, resulting in modulation bandwidths of 1 GHz at RF frequencies for signal simulations employed in functional testing of chip sets designed for modern digital communications radios.
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Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-03
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The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
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The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
3GHz Four Channel Signal Generator 19" 1U Rack Module
LS3084R
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The LS3084R, 3GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe Multi-Channel Function Generator Module, 32-Channel
43-625-001
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The 41-625-001 (PXI) and 43-625-001 (PXIe) are function generator modules that provide 32 channels in a single PXI/PXIe slot. They can generate sine waves to 300 kHz with 5.76 mHz frequency resolution referenced to the 10 MHz PXI clock. The output voltage range is up to +/-25 V in a 16-bit resolution. It also support PXI trigger functions allowing events from other instruments to initiate waveform generation or sweeps.
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Product
6GHz Four Channel Signal Generator
LS6084B
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The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI/PXIe Arbitrary Generator Family
PXA(e)72xx
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The arbitrary waveform generators of the PXA72xx family feature 16-bit resolution at a maximum sample rate of 200 ms per second. Furthermore, the devices can directly output voltages up to 30 V (or ±15 V).
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Product
PXIe-5433, 80 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785118-01
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The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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100MS/s Four-Channel Arbitrary Waveform Generator
WW1074
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The WW1074 offer a 100 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 50MHz.
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6GHz Single Channel Signal Generator 19" 1U Rack Module
LS6081R
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The LS6081R, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS6081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
PXI/PXIe Arbitrary Generators
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The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
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Product
9GS/s 8Bit, 4GS Mem 4CH 16 Markers AWG
P9084D
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The Proteus P9084D, is a 9GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9084D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
18 Bit / 300 MS/s Arbitrary Waveform Generator
AWG18
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The AWG18 is an 18 bit Arbitrary Waveform Generator for high-speed / high resolution waveform generation. This module features two dedicated signal paths. A DC to 100 MHz path which is optimized for accurate time domain and frequency domain measurements up to 30 MHz. And a dedicated AC path optimized for signals between 10 MHz to 100 MHz. In combination with the built-in filters it features a typical harmonics level of better than -80 dBc for the whole range.
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Product
PXI Three Channel Function Generator
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Our PXI Function Generator is capable of generating sine, square and triangle waveforms to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. It can generate fast swept frequency signals, permitting the output to emulate the operation of variable speed devices. The module can also generate arbitrary waveforms loaded into its internal 256k memory, allowing the emulation of many waveform types including the typical waveforms of automotive and aerospace sensors.
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PXIe Arbitrary Waveform Generator, 500 MSa/s, 16 bit, 200 MHz
M3201A
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The M3201A PXIe arbitrary waveform generator is ideal for general purpose AWG automated test requirements. It offers high channel density with high-quality output with low phase noise. The optional real-time sequencing, intermodulation synchronization, and graphical FPGA programming software tools expand its capability to enable a number of solutions including envelope tracking (ET) and DPD (part of PA/FEM reference solution), MIMO, baseband electronics design, wireless device manufacturing, ATE, beamforming and other multi-channel coherent signal generation and multi-channel signal generation.
