MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.
- 978-645-5500
- 2 Tech Drive
Suite 201
Andover, MA 01810
United States of America
-
Product
Advanced IR Gas Analyzer For Process Monitoring
T-Series
-
T-Series Inline Gas Analyzer improves gas measurement accuracy over the traditional non-dispersive infrared (NDIR) analyzers using Tunable Filter Spectroscopy (TFS™), a spectroscopic scanning technique capable of generating slices of spectra in the infrared region. Each scan produces an absorption spectrum which is used to identify compounds and provide concentration values. TFS technology improves gas identification accuracy and selectivity by subtracting out spectra from interferent gases within the same infrared regions. This spectral processing capability also provides multi-component measurement.
-
Product
Compact Pressure Transducers And Switches
-
Compact Baratron® capacitance manometers are ideal for space constrained applications. Compact pressure transducers provide an analog output proportional to pressure, while compact pressure switches provide a relay output based on pressure.
-
-
Product
Vapor Source Mass Flow Controller With Viscous Laminar Flow
-
The 1152C Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.
-
Product
Precisive® 5 Application Specific Gas Analyzers
-
The Precisive® Gas Analyzer is a real-time gas analyzer based on MKS' unique Tunable Filter Spectroscopy (TFS™) platform. The Precisive suite of products are calibrated for the measurement of a wide range of gases across multiple process industries. The real-time, continuous measurement capability provides immediate analysis ensuring control of critical process parameters.
-
Product
Mass Spectrometers
-
Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers.
-
Product
Vacuum Process And Chamber Environment Monitors
-
Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.
-
-
-
Product
DELTA™ IV 4-zone Flow Ratio Controller
-
DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.
-
Product
Remote Plasma Sources For Process Applications
-
MKS remote plasma sources deliver high density reactive radicals improving on-wafer cleaning and deposition throughput. Solutions consist of a fully integrated, self-contained unit designed for quick on-chamber installation providing fast, reliable plasma ignition of O2, Hydrogen and Nitrogen gases in a customer configurable package. All solutions are equipped with intelligent power control and EtherCAT® diagnostics supporting Industry 4.0.
-
Product
Ozone Gas Generators
-
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
-
Product
General Performance Pressure Transducers And Switches
-
These general performance Baratron® capacitance manometers are available as pressure transducers with an analog signal proportional to absolute or differential pressure, or as switches with relay outputs based on pressure.
-
Product
FTIR Gas Analyzers
-
FTIR Spectroscopy gas analyzer instruments from MKS Instruments are capable of ppb to ppm sensitivity for multiple gas species in a variety of gas analysis applications, such as toxic gas detection, automotive emissions measurement, and monitoring stack emissions, processes, ambient air, purity, and selective catalytic reduction performance.
-
Product
R*evolution® Remote Plasma Source
-
The innovative R*evolution® Remote Plasma Source combines field-proven, low-field toroidal plasma technology with an actively cooled plasma chamber made of high purity quartz, significantly reducing oxygen, hydrogen and nitrogen atomic gas loss through wall recombination. Self-contained and compact, R*evolution delivers up to 10 slm of oxygen radicals from a 6kW power supply with true power accuracy of <1% resulting in a high density, extremely clean radical source for photoresist strip and an optimal clean rate greater than 12 microns/min-1. R*evolution can be used for other surface preparation applications.
Children
-
Newport Corporation
Newport is a brand within the MKS Instruments Light & Motion division. The Newport product portfolio consists of a full range of solutions including motion control, optical tables and vibration isolation systems, photonic instruments, optics and opto-mechanical components. Newport’s innovative solutions leverage core expertise in vibration isolation and sub-micron positioning systems, opto-mechanical and photonics subsystems, to enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research and defense markets.
Children
-
Electro Scientific Industries, Inc.
Leveraging its innovative technical competencies, ESI's portfolio of micro-engineering solutions enhances manufacturing processes around the globe
Children
-
Newport Electronics
Newport Corporation, a wholly owned subsidiary of MKS Instruments, Inc. (NASDAQ: MKSI ), is a leading global supplier of advanced technology products and systems to customers in the scientific research, microelectronics, life and health sciences, industrial manufacturing and defense/security markets. Established in 1969, Newport has over 52 years of industry knowledge and expertise across a broad range of technologies allowing the company to continually deliver innovative products in the areas of lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, and optical components and subsystems to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. In addition, Newport has built a strong history of partnering with OEM customers, delivering solutions from subassemblies to full solutions including design, testing and manufacturing.
Children
-
Ophir
Ophir is a brand within the MKS Instruments Light & Motion division. The Ophir product portfolio consists of laser and LED measurement products, including laser power and energy meters and laser beam profilers
