NAPSON Corp.
Developing, manufacturing and selling measurement systems and software for silicon wafers/ingots and FPD process production
- +81-3-3636-0286
- +81-3-3636-0976
- 2-36-12, Kameido
Tokyo, Koto-ku, 136-0071
Japan
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Product
Fully Automatic 4 Point Probe Sheet Resistance System For Semiconductor Process Evaluate
WS-3000
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*Automatic probe head selection(exchanger) among 4 kinds of probe head*[No need to exchange a probe head by each different sample measurement]*Edge 1mm measurement is available by dual meas. mode*High cost performance from high speed measurement*FOUP compatible, GEM / SECS compatible
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Product
Non-contact Conductivity Type (P/N) Checker For Quick Check
PN-50α
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*Principle: Photovoltaic effect by light pulse irradiation*No damage and no stain by Non-contact method*Possible to check even oxidized film on wafer surface*Instantly discrimination by optical pulse illuminate
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Product
Non-contact Measurement Wafer Sorting System (Robot Hand Tranceportation)
NC-3000R
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*High accuracy measurement system for large diameter wafer*Non-contact measurement of resistivity, thickness and conductivity (P/N)*Compact design of Two-stage by measuring area and transfer area*Number of cassette station can be changed by customers request Option : Add wafer flattness measurement system(FLA-200)
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Product
Non-contact Sheet Resistance/resistivity Measurement Instrument With PC
NC-10 (NC-20)
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*Easy operation and data processing by PC*No damage measurement by non-contact eddy current method*Replaceable probes by meas. range (*Second or more probe is for the option)*1 point measurement of center position*5 types of model for each measuring range*Temperature correction for silicon wafer function
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Product
Semi-auto 4 Point Probe System for Solar Cell Substrate
RG-100PV
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*Measurement system for thin film on substrate samples for multi-points measurement*Even pitch and random pitch for Max.1,000 points*2-D/3-D square mapping software for even pitch
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Product
Non-contact Inline Sheet Resistance Measurement Module For Flat Panel Display
NC-600
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*Non-stop and non-contact sheet resistance measuring of thin film on glass runs through on conveyer*1 to 10 number of probe by sizes of glass is attachable*Glass collision prevention function*Continuous test data report to the host computer
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Product
4 Point Probe Sheet Resistance/Resistivity Measurement with Temperature Controled System
TCR-600
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*Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)*600C compatible probe head with 1mm linear*Controlled with vacuum sensor, digital thermo-meter, vacuum gauge and gas flow meter*Temperature measuring accuracy：±（0.5% + 1℃）
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Product
Hand Held Sheet Resistance Measurement Instrument[Replaceable Probe Set (Non-destructive Probe & Contact Probe) ]
DUORES
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Easy to measure sheet resistance & carry aroundReplaceable hand-held probes for Non-destructive & Contact type
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Product
Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
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*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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Product
Manual Four Point Probe Sheet Resistance/resistivity Measurement
RT70V series
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• Combinational measurement system by Measurement tester(RT-70V) & Stage.• Thickness input with easy JOG dial operation (RT-70V Tester)• Tester self-test function/Auto change-over measurement range function• Thickness & Temperature correction function for Silicon sample
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Product
Non-contact Sheet Resistance /resistivity Measurement Instrument
EC-80
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*Easy operation and compact design*Auto-measurement start by inserting a wafer under the probe*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range
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Product
Life-time Measurement System For Silicon Bulks/ingots By JIS Method
HF-100DCA
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*Global standard model for the lifetime test of silicon bulk*JIS direct current anodizing method*Data processing by digital oscilloscope and PC with software
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Product
Portable Pen-type Non-contact P/N Checker
PN-8LP
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*Principle: Photovoltaic effect with the 650nm laser diode*Power supply : DC1.5V(size AA alkaline battery), 300mA*Display of judgement : P(red) or N(green) LED lamps
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Product
Non-contact Inline Sheet Resistance Measurement Module For Conductive Layer On Substrate
NC-700
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*Inline measurement module for moving substrates such as PET film, glass or paper*Continuous measurement(~24h) in Roll to Roll with OFF-SET FREE capability system*Various applications from the research and development to the production line
